For traditional alumina, beryllium oxide and other ceramics for energy transmission windows, the traditional molybdenum-manganese metallization process is mostly used. But when applied to small terahertz devices, the process controllability becomes very poor. Select Ti-Mo-Ni thin film metallization process.
Using a specially designed mask fixture, the diamond sheet is centered and fixed on the substrate, and then three-layer magnetron sputtering equipment is used to sputter three layers of titanium, molybdenum and nickel metal thin films. Finally, the window frame of the energy transmission window and the metalized diamond sheet are brazed with silver-copper solder.
From the EDS spectrum analysis of the microstructure of the tensile structure of the SEM photograph at different positions, the scanning tunneling microscope Ti is mainly concentrated on the surface of the diamond film, indicating that Ti and C have strong affinity, and the Hebei aerator may have formed on the surface Carbon titanium transition layer. According to XRD analysis, after high-temperature treatment in a vacuum furnace, diffraction peaks of Ti8C5 and TiO appeared, indicating that a chemical reaction occurred between the diamond film and the Ti film.
The above analysis results can lay a solid theoretical foundation for the diamond thin film metallization process. The W-band traveling wave tube sealed by the above metallization process has a reliable structure after welding with a diamond energy transmission window, and the leakage rate is less than 1 × 10-10Pam3 / s.
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